Used LAM RESEARCH Exelan #293614971 for sale

LAM RESEARCH Exelan is an advanced etcher and asher for semiconductor wafer processing. It is a single-chamber asher with a state-of-the-art controller that offers excellent precision, repeatability, and reliability in all deposition applications. Exelan is capable of simultaneously etching and ashing multiple substrates with a wide variety of chemicals and etch chemistries. In addition, LAM RESEARCH Exelan is designed with a process chamber that maximizes safety, material efficiency and cost savings. Exelan is designed to etch and asher a wide range of materials including metals, compound semiconductors, polymers and carbon nanotubes. This makes it ideal for applications that require rapid turnaround times, as it can achieve uniform results even with limited sample size. The controller of LAM RESEARCH Exelan is designed to enable flexibility in process parameter settings, making it suitable for customer research and development applications. The machine has an automatic chamber cleaning equipment that utilizes brush scrubbing for effective surface cleanliness and chamber maintenance. This is complemented by automatic purging and venting that enhances the reliability and repeatability of the processes. It also features a nitrogen overhaul system that helps minimize particulate contamination, which is beneficial in applications where surface contamination can be detrimental. In order to ensure a safe working environment, Exelan has an explosion detection unit. This machine is particularly useful for semiconductor wafer production, as it can reduce the risk of an explosive reaction by monitoring gases in the chamber before the semiconductor wafers are exposed to them. LAM RESEARCH Exelan has a hermetically sealed process chamber that minimizes the probability of particle contamination, while the chamber has been designed in such a way as to reduce the chance of process failure. Overall, Exelan is an efficient and reliable etcher and asher that ensures excellent precision and repeatability in all deposition processes. The advanced controller, automatic chamber cleaning tool, nitrogen overhaul asset, and explosion detection model make sure that the equipment maintains safe working conditions, while the hermetically sealed process chamber ensures maximum safety and reliability for wafer production.