Used LAM RESEARCH Exelan #293615012 for sale

LAM RESEARCH Exelan is a cost-effective, high-performance etcher/asher designed for high-volume IC production. It is an advanced production-class manufacturing equipment capable of providing precise and repeatable parameters while performing extremely demanding etching and ashing processes. Exelan delivers robust and reliable performance, making it ideal for use in high-volume production of ICs. LAM RESEARCH Exelan utilizes a fully-integrated plasma etching system with integrated end-point detection technology. This integrated automation unit delivers precise process control and high-performance throughput. The machine features multiple etching and ashing capabilities for the most demanding etching tasks and the ability to etch the most challenging compounds. Exelan utilizes a parallel-plate high-frequency power supply to deliver low-pressure plasma charging, providing precise control over plasma etching processes. It further provides high-rate material removal by delivering uniform etching over a wide temperature range without any damage to underlying layers. It also provides high-resolution imaging capabilities. In addition to its etching and ashing capabilities, LAM RESEARCH Exelan also offers several ancillary services designed to maximize production efficiency and reduce cycle times. This includes automated chamber cleaning and maintenance, as well as automated process monitoring for increased safety and quality control. Exelan has also been designed to simplify operator interaction. It includes an intuitive user interface featuring color displays and menus to ensure efficient and effective operation. LAM RESEARCH Exelan also includes remote access capabilities, enabling users to program and monitor the etcher from remote locations. Exelan is a powerful and versatile tool for high-volume IC production. Its advanced etching and ashing capabilities, sophisticated automation and monitoring tool, and intuitive user interface make it an ideal solution for demanding etching processes. Its reliable operation and consistent results provide enhanced productivity and improved yields.