Used LAM RESEARCH Exelan #293615013 for sale

LAM RESEARCH Exelan is an etcher/asher designed to provide precise control of etch rates and uniformity. The etch chamber features are large enough to accommodate processing up to 8-inch wafer. Exelan is able to adapt to a variety of substrates such as silicon, quartz, and others. LAM RESEARCH Exelan's desktop etch equipment has a simple process control interface which allows for automated processing. It utilizes a powerful process control algorithm to facilitate faster ramp rate and accurate etch rate control. It has custom-designed hardware that supports a wide range of etch process recipes, allowing for precise etching control for each substrate. Exelan's platform-level vacuum system utilizes a dual-diffusion pump configuration to provide a high level of vacuum. It has a dedicated microcontroller and a laser-based feedback loop for controlling the chamber pressure to reduce particle contamination. The etcher is designed to support a range of production workflow systems. It is also equipped with safety mechanisms that limit etch-induced vacuum pressure fluctuations and ensure the safety of the operator and the equipment. LAM RESEARCH Exelan unit is configured to be used with the chemical of choice. It features two fill and empty ports, where the dry chemicals can be received and the used chemicals can be removed. It also includes a vacuum exhaust port to safely remove the gaseous products of the etching process. Exelan is a reliable and dependable etcher machine that provides a high-resolution etch profile. It has been designed to offer cross-platform compatibility and allows users to switch among different fabricators with minimal effort. It uses an advanced pitch-catch etch control strategy that minimizes etch depth non-uniformity and ensures a consistently accurate etch result. LAM RESEARCH Exelan is a time and cost-efficent etcher tool that can deliver repeatable and high-quality results. It is ideal for a variety of etching applications like MEMS, high aspect ratio, embedded backside etch, and much more. It offers flexibility and a low cost of ownership, making it an ideal choice for industrial and academic institutions.