Used LAM RESEARCH Exelan #9043091 for sale

LAM RESEARCH Exelan is a high-performance, multi-functional etcher/asher designed for precision etching, ashing, and cleaning of very sensitive materials. As a state-of-the-art etch/ash equipment, Exelan offers a high level of process stability and repeatability, ensuring consistent results on complex substrates. Its integrated design includes a powerful plasma source, an automated sequential control system, and advanced pattern recognition software. The plasma source is capable of delivering highly repeatable etch/ash rates, with a low variation between each etch/ash cycle. The integrated controller ensures that both the etch and ash processes are maintained at the same parameters, ensuring the highest process quality. The pattern recognition software assists in accurate substrate positioning and wafer handling. LAM RESEARCH Exelan has a number of unique features, such as an advanced automated cleaning unit with advanced chemical delivery, a specialized dry-etch machine, improved recipe organization, and process optimization. The automated cleaning tool is capable of handling a wide range of chemistries, while providing a high level of flexibility and control. The advanced chemical delivery asset allows for precise control of the cleaning process, and is designed to ensure optimal material removal without over-etching. Exelan also features a specialized dry-etch model for ultra thin etching of thin devices with high precision. It uses a special gas surge based etching process which provides faster processing times and improved etching accuracy. It is also capable of handling very high etch rates and fine geometry etching, making it perfect for high-precision, micro-scale processes. LAM RESEARCH Exelan is designed to handle the most challenging of processes, while providing uniform results and repeatability. Its integrated design ensures high process stability and reproducible results on a wide range of materials. Its combination of advanced processes, powerful plasma sources, and automated control make Exelan an ideal etcher/asher for any high-precision application.