Used LAM RESEARCH Exelan #9235218 for sale

LAM RESEARCH Exelan is an etcher / asher equipment designed for the etching and ashing of semiconductor materials. It has a multitude of features that make the process of etching and ashing efficient and precise. The system is composed of a gas panel, a plasma source, a controller, and a vacuum chamber. Exelan gas panel is designed to precisely control the supply and composition of reactive gases used to etch and ashing process. It comes with a selection of various connectors, valves, pipes and regulators to allow utilization of multiple gases during etching and ashing applications. LAM RESEARCH Exelan plasma source is designed to produce an increase in temperature of a material's substrate up to several thousand degrees Celsius. This high-temperature environment allows the reactive gas molecules to remove target material from the substrate by thermal etching or ion-assisted etching. Exelan controller provides precision control and monitoring of the etching and ashing process. It is equipped with a powerful programmable logic controller or PLC that allows for process automation, allowing for low labor costs and increased throughput. The controller also includes a graphic user interface for easy setup and control of the etching and ashing process. The vacuum chamber of LAM RESEARCH Exelan etcher / asher unit is sealed off to produce a vacuum environment to reduce the risk of contamination and improve the process yield. It also comes with various pumping and auxiliary systems to ensure optimum vacuum pressure and temperature control during the process. Exelan etcher / asher machine is an ideal tool for etching and ashing of semiconductor materials due to its advanced features, superb duty cycle capability, precision etching processes, and great reliability. It is also a great choice for companies looking for a cost-effective way to manufacture semiconductor products with the highest levels of quality and reliability.