Used LAM RESEARCH Extrima 3100 #293820193 for sale

LAM RESEARCH Extrima 3100 is a high-performance, advanced etcher/asher and is one of the industry's most reliable and efficient plasma etching systems on the market. Through high-pressure technology and precise control, Extrima 3100 offers superior etch quality, improved uniformity, and higher wafer yield. The etcher/asher includes a range of features to ensure reliable and repeatable operations in critical applications. The chamber is designed for short-cycle times to improve wafer throughput by up to 40% compared to traditional methods. The stainless steel chamber walls are coated with a combination of materials to ensure uniformity and accuracy of the etch process. The hardware of LAM RESEARCH Extrima 3100 comprises of 6 Electron Cyclotron Resonance (ECR) sources to enable accurate and efficient delivery of radiofrequency power. It also has Advanced Substrates Gas Injection Equipment (ASGIS) delivers a precise mixture of etch and cleaning gases. At the heart of the system lies the automated Electrostatic Chuck unit which securely grips wafers to achieve optimum cleaning results. The software components of Extrima 3100 facilitate precise process control including Gas Mixer, Process Monitoring, and Feedback Control. These features enable operators to adjust the parameters of the plasma recipe such as Pressure, Gas Mixture, Resupply Gases, Exhaust and Temperature. The machine also offers Environmental monitoring of the chamber to ensure process accuracy and to detect un-established variables. LAM RESEARCH Extrima 3100 is designed to handle wafers ranging from 50mm to 300mm and is ideal for any critical semiconductor etching or etch/clean processes. Its advanced build quality allows it to be utilized in various industries such as flat panel display, MEMS, and MEMS packaging, LED, storage device fabrications and other semiconductor wafer fabrication techniques. The tool is compatible and easy to integrate with numerous in-house tools to deliver maximum flexibility to an automated production line.