Used LAM RESEARCH Extrima 3100 #9270874 for sale

LAM RESEARCH Extrima 3100
ID: 9270874
Dry etcher.
LAM RESEARCH Extrima 3100 is an advanced etcher/asher designed for semiconductor etching and substrate preparation applications. This versatile machine offers superior etching performance with an array of capabilities, enabling efficient wafer processing. The machine is outfitted with a robust set of process parameters, which can be customized to suit the application at hand. It features a high-precision DC bias power supply for precise etching with maximum process control. The dual-zone linear etching system has a fast scan speed for high throughput etching. The etching chamber is ceramic-lined for uniform etching and substrate protection. Additionally, it is outfitted with an integrated ionizer to neutralize static charge during processing. The machine is designed with automated process control and low-power consumption features, allowing for optimum etching performance with minimal energy use. It also offers reliable performance in a compact design and its touchscreen control panel operates intuitively. In addition to its core etching/ashing capabilities, Extrima 3100 also offers analytical and diagnostic features such as thickness measurement, crystal analysis and PVD analysis. It is also equipped with safety features for improved operation and maintenance. LAM RESEARCH Extrima 3100 is an advanced etcher/asher designed specifically for the semiconductor industry to provide superior etching performance. Its range of process parameters, and integrated analytical and diagnostic features, enable efficient wafer processing with a high degree of accuracy and reliability. It is an ideal machine for fast and precise etching and substrate preparation applications.
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