Used LAM RESEARCH Extrima 3100 #9314231 for sale

LAM RESEARCH Extima 3100 is an etcher / asher designed to deliver precise, high-quality etching and ashing processes for a wide range of microfabricated semiconductor and MEMS components. The equipment provides the advanced capabilities necessary to achieve both uniform coverage and fine line resolution, enabling the production of specialized microelectronic devices. It employs advanced materials for improved throughput and wider etch depths. The system is also designed to meet the exacting specifications required for clean and repeatable processing results. The Extima 3100 features an advanced directional-etching unit with a gas mixture ratio controller and multiple speed selection, giving users the ability to rapidly, accurately, and repeatably etch and asher a variety of materials. It also has a high-precision, end-point detection machine that allows for extremely accurate control of the etch process. With this tool, etch times and desired feature sizes can be easily monitored and optimized. Furthermore, the asset's controlling software enables its operation in various modes including process pulse and bias RF etching. LAM RESEARCH Extima 3100 etcher / asher includes an auto-replenishment model to maintain optimal chamber conditions for repeatable processes. As it continuously circulates and replenishes processing gases, the equipment eliminates the need for manual additions and helps extend process maintenance intervals. Additionally, its integrated tool setup program eliminates the need for lengthy setup times, enabling consistent production throughput. Together with its powerful software suite, the system provides a range of user-defined processes and complete SPC (Statistical Process Control) support. This provides users with complete and customizable process control, including recipe-generation and complete record-keeping capabilities. In summation, LAM RESEARCH Extima 3100 etcher / asher offers a powerful unit for the manufacture of complex microelectronic devices. Its advanced etching capabilities and wide range of control options provide the precision and repeatability necessary to produce consistent, high-quality results. Its auto-replenishment machine simplifies maintenance and setup, while its easy-to-use software suite helps ensure repeatable, error-free processes. Finally, with its complete SPC and recipe-generation capabilities, the Extima 3100 provides users with the flexibility and control needed to deliver specialized, high-end devices.