Used LAM RESEARCH Flex 45 #293587510 for sale

LAM RESEARCH Flex 45 is a single-wafer etch and asher tool that offers a wide range of process control and flexibility. With an industry-leading chamber design, it includes patented technology such as programmable drive and active fluid control, advanced process uniformity, and superior particle control. This makes it ideal for MEMS, nanofabrication, and other applications in need of precision etch and ashing processes. Its internal architecture is designed for single-wafer parallel etch and ashing, enabling high throughput and advanced process uniformity. This makes it an excellent choice for etching and ashing applications in a variety of semiconductor applications. Flex 45 features a large-area chamber that supports various processes in a single platform. It comes with a turbocharger design and a range of mV and nA precision etch and ashing technologies that are optimized to handle a wide variety of applications. With an active flow control system, it ensures high uniformity of etch and ashing processes by automatically adjusting flow rates and pressures. In addition, its process control technology reduces total cost of ownership and provides advanced process control and uniformity for etching and ashing applications. This etch and asher also offers superior particle control with advanced filter solutions that guarantee clean, particle-free etch and ashing chambers. It is built with advanced engineering capabilities such as self-diagnostics and remote monitoring, which ensure optimal uptime and reliable performance. It also has extensive safety features, including sensors and interlocks for the prevention of damage to wafers and process components. Overall, LAM RESEARCH Flex 45 is a truly unique etch and asher with a host of features that ensure superior quality and reliable performance in a range of applications. Coupling advanced process control and uniformity, superior particle control, and excellent reliability and uptime, Flex 45 is an ideal choice for applications requiring precision etching and ashing.