Used LAM RESEARCH Flex 45 #293652872 for sale

LAM RESEARCH Flex 45 is a high-precision etcher/asher designed to enable ultra-precise, reliable processing of complex substrates and applications in the etching and ashing fields. With advanced motion and temperature control, it delivers superior process uniformity, high throughput, and tight feature-to-feature dimensional control for critical applications in the microelectronics industry. Flex 45 is equipped with a full-field, true isotropic, capacitively-coupled plasma (CCP) etching capability that is coupled with micromachined microelectrode technology to provide extremely high-resolution etching performance. By providing a better control over the energy coupling and power density during the process, LAM RESEARCH Flex 45 can minimize processing time and minimize unwanted side effects due to non-uniform plasma exposure which can cause processing inconsistencies. Also, Flex 45 offers advanced process control with a powerful controller that allows real-time process monitoring in order to quickly adjust exposure, temperature and other parameters. It is solidly built with a robust structural frame and a stainless steel chamber that has been designed to provide excellent thermal and mechanical stability over a wide range of process conditions. The system also features a sophisticated inert gas management system (IGMS) that delivers very precise and repeatable recipe-controlled gas management. This ensures a reliable and efficient plasma process, complete with a tight control of the process parameters, for high-yield etch or ashing production. Finally, LAM RESEARCH Flex 45 includes a comprehensive Interface and Communication Terminal (ICT), which helps in managing all aspects of automated process control and data acquisition. This terminal helps to reduce programming time and effort and allows operators to easily access recipes and set up parameters. It features error monitoring, parameter recording and variable display capabilities, plus an intuitive user interface. This makes it a powerful tool for precision etching and ashing processes.