Used LAM RESEARCH Flex 45 #293809879 for sale
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ID: 293809879
Vintage: 2007, 2009
Etchers
(1) Equipment Front-End Module (EFEM)
(1) Transport Module (TM)
(1) Gate Interface Box (GIB)
(3) C/Bs
(3) Gas boxes
(3) RF carts
(1) Air Conditioning (AC) rack
(1) Remote Process Data Box (RPDB)
(3) Load ports
Covers
(2) Parts boxes
2007, 2009 vintage.
LAM RESEARCH Flex 45 is a highly advanced etch / asher tool used primarily in advanced semiconductor device fabrication. Flex 45 provides high throughput etching and ashing capabilities in an ultra-compact package that enhances process flexibility while minimizing space requirements. With advanced equipment features such as parallel processing for large volumes, LAM RESEARCH Flex 45 can accommodate a wide range of film etching and ashing applications. Flex 45 supports uniformity across various wafers through its dynamic process parameters. These parameters can be adjusted through the user-friendly interface of the operator console, and include substrate tuning, gas flow control, and source power. With the availability of multi-frequency power sources, the ability to choose the appropriate power source for any given channel or wafer increases throughput and quality. Along with its impressive etch and ashing capabilities, LAM RESEARCH Flex 45 provides advanced safety features which are essential during operation. It has a freely programmable safety interlock and an emergency shut-down that is engaged if the operating temperature exceeds a certain user-defined threshold. This ensures the protection of personnel, materials, and equipment. For the best results, proper training and maintenance are essential for the proper operation of Flex 45. Comprehensive training procedures provide users with the necessary tools and knowledge to handle any operation or process related issues. As part of its maintenance programme, weekly field inspections are carried out to ensure proper operation and prevent any unexpected downtime. In conclusion, LAM RESEARCH Flex 45 is a highly advanced etcher/asher, ideal for applications in the semiconductor industry. Due to its multi-frequency power source, ability to tune process parameters, and safety features, Flex 45 provides high throughput and high quality results. Along with proper training and maintenance, LAM RESEARCH Flex 45 is a reliable and easy to use tool that can be fundamental to the success of any modern semiconductor device fabrication process.
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