Used LAM RESEARCH Flex 45 #9241255 for sale

LAM RESEARCH Flex 45 Asher is a high-precision tool for performing both wet and dry etching processes. This equipment is designed to provide precision etching and cleaning capabilities, with precise latitude control and flexibility. The unique features of Flex 45 include a powerful, self-contained, ion-beam etching chamber, a wide range of etching and cleaning processes available, and the ability to process both soft and hard materials. The equipment is capable of both linear and rotational displacement control, as well as the capability to perform multi-step processes. LAM RESEARCH Flex 45 system includes a vacuum tight chamber containing a low temperature plasma source which is used to etch and clean substrates. This plasma source is designed for both sacrificial and selective etching, as well as dry cleaning capabilities. Flex 45 also contains a robotic arm with the capability to move substrates into and out of processing position, along with precise orientation and angle positioning. Along with its robotic arm, LAM RESEARCH Flex 45 also contains a process-control unit, complete with PC-based software, a data logger, and a pneumatic timer, for precise timing and control of the etching process. The flexibility of Flex 45 proved to be the main selling point as the tool was designed to perform various etching processes on diverse material sets. LAM RESEARCH Flex 45 is capable of performing RIE and DRIE etching, as well as strip etching, with both single- and multi-step processes. Additionally, Flex 45 can provide an ion-beam etching process, which is an ideal technique for hard-to-etch materials, such as aluminum nitride. In addition to these specialized etching processes, LAM RESEARCH Flex 45 also includes wet etching and cleaning processes, as well as a wide range of preconditioning cycles to help ensure the highest level of process repeatability and accuracy. The intuitive operating machine of Flex 45 gives users the capability to control practically all parameters essential to a successful etching or cleaning process. The fully automated process-control tool provides LAM RESEARCH Flex 45 with the capability to self-monitor, making sure that every step of the process is performed correctly and efficiently. The ample number of processes available paired with its advanced automation capabilities makes Flex 45 an ideal tool for any etching or cleaning task.