Used LAM RESEARCH Flex 45 #9281284 for sale

LAM RESEARCH Flex 45 is a PECVD etcher/asher for a variety of semiconductor applications. This highly advanced etcher/asher provides high-resolution process capabilities with precision control over size, uniformity, and anisotropy. Flex 45's chamber design features a flat bottom source-drain isolation and a high-vacuum chamber. The chamber is designed to reduce process drift and optimize substrate uniformity, allowing the processor to reach higher levels of performance. LAM RESEARCH Flex 45 offers a range of features and functions that can be customized to meet the exact needs of each user. Dual-layer, multi-crystalline silicon processes are enabled by the adjustable substrate heater and advanced mass flow controller (MFC). This allows the process to be optimized for high quality results with minimal photoresist bleed and minimal dopant absorption. The built-in preventative maintenance feature helps reduce downtime and ensures the system undergoes regular maintenance to prevent process errors. Flex 45 also features a variety of safety features, such as an automatic process shutoff when the chamber is opened, emergency door shutoff, and temperature setpoint limits. This ensures that process errors are minimized and keeps users safe. LAM RESEARCH Flex 45 is powered by a high-end semiconductor control module (SCM). This advanced controller monitors and adjusts etch recipes in real time, while providing advanced reporting capabilities and traceability of the etch process. Flex 45 is designed to provide maximum throughput and superior uniformity with minimal downtime and outstanding process quality. It is ideal for high-volume production of semiconductor devices, providing cost-effective and reliable results for a wide range of technologies.