Used LAM RESEARCH Flex 45 #9298282 for sale

LAM RESEARCH Flex 45 is a high-performance, high-productivity etch/ashers designed to meet production requirements for a variety of materials and processes. This versatile equipment features advanced technologies like multi-waveform RF power, deep reactive ion etching (DRIE), and advanced process control. Flex 45 utilizes extreme ultraviolet masks and high-resolution electron-beam lithography to create patterns on the wafer with sub-micron resolution. With its advanced process control hardware, LAM RESEARCH Flex 45 also allows users to precisely control the parameters that influence the etching or ashing process. This system also provides multiple gas capabilities and the ability to execute single wafer or multiple wafer recipes quickly. Flex 45 unit is renowned for its repeatability and stability, enabling uniform process results over long periods of time. This is supported by the fact that the machine maintains excellent repeatability and distribution of process byproducts. The tool's overall consistency also helps reduce line downtime due to process variances. Due to LAM RESEARCH technical know-how and passion for product innovation, LAM RESEARCH Flex 45 offers advanced automation capabilities that improve the efficiency of the etching/ashing process. Among its outstanding features are Selective Area Cleansing (SAC), which helps users clean the etch area faster and more effectively, as well as Kinetic Energy Management (KEM), which helps reduce the number of unforeseen disasters caused by tool-to-tool interactions. Robustness and versatility come together in Flex 45. This etch/ashers is capable of performing various operations on different substrates, and it is designed to meet stringent performance requirements. Its advanced features enable users to produce complex products within a shorter time frame compared to traditional processes. This asset also provides a high level of process quality control that minimizes downtimes and ensures consistent processes.