Used LAM RESEARCH Flex 45 #9298284 for sale

LAM RESEARCH Flex 45 is an etcher/asher designed to provide an efficient and reliable platform for etch and ash processing of various materials for a wide range of applications. Flex 45 offers a two chamber configuration with both chambers optimized for etch and ash operations. Its first chamber utilizes a low-pressure, high-vacuum environment to clean the wafer of contaminants prior to etching. The second chamber is optimized to provide plasma control and uniformity for etch/ash operations. LAM RESEARCH Flex 45 offers a wide range of features that allow for precise and uniform etching and ash results across multiple wafer sizes. In particular, the advanced automation protocol enables users to quickly and easily adjust etch recipes, using the intuitive menu-driven software. Flex 45 also includes a variety of sensor and monitors to ensure that conditions are being properly maintained to guarantee the highest levels of performance. LAM RESEARCH Flex 45 is equipped with a broad range of processing components and materials for flexible etching capabilities, including a high-power radio frequency power source, multiple chuck designs for both vertical and horizontal chambers, and numerous gas delivery systems. These components are combined with Flex 45's proprietary dual-zone etch/ash control system, which can be used to modulate etch time, gas pressure, and temperatures to optimize the etching and ash process for specific materials and applications. LAM RESEARCH Flex 45 also offers a range of safety features to protect personnel from any potential hazards. These features include automated emergency shutoff capability in the event of an alarm, the ability to monitor process gases, vacuum levels, and temperature, as well as an integrated access control system to limit access to specific areas. By combining precision etch/ash technology, advanced automation capabilities, and robust safety features, Flex 45 is an ideal platform for fast and efficient processing. LAM RESEARCH Flex 45 is a reliable and flexible etcher/asher, providing users with repeatable results and the highest levels of performance across multiple materials.