Used LAM RESEARCH Flex 45 #9308360 for sale
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LAM RESEARCH Flex 45 is a high-performance, fully automated chemical etcher/asher equipment designed for a range of advanced applications. Flex 45 is an advanced etcher/asher system based on multifunctional, process programmable technology. It is designed for maximum etch uniformity, flexibility, and productivity for a variety of etching/ashing applications. The unit is designed to enable outstanding precision and device-to-device uniformity, even when processing increasingly complex and sensitive 3D structures. The machine is equipped with a comprehensive set of powerful process and safety control features that allow users to optimize their desired etching/ashing results. It is engineered with patented microprocessors and proprietary software that provide fast and accurate feedback to process maintenance and control. LAM RESEARCH Flex 45 is designed for high precision, high throughput, and high quality wafer surface conversion. Flex 45 is an efficient, low-cost tool that delivers high throughput and high precision etch/ash results with fewer chemical usage requirements. The asset design allows for low particle flow rates, low level of background metallic contamination, and easy changeover from chemical to gas mode. It features an extremely fast time-to-conversion, a manually adjustable rate of deposition, and a wide process window. The model offers the flexibility to process a large range of wafer sizes and materials, including single-side and double-side, high density Interconnects, SiC, GaN, and other materials. LAM RESEARCH Flex 45 provides a range of high-performance, custom etch/ash process modules depending on the application, including CMP slurry, PECVD, and ALD. Flex 45 also offers an advanced cleaning and etching/ashing solution. Specialized in-situ, non-contact self-cleaning technology helps reduce contamination and increases device performance. The equipment's automated process control and maintenance features simplify operation and minimize downtime, ensuring maximum availability and cost savings. LAM RESEARCH Flex 45 is ideal for advanced etching/ashing applications. It is a high-performance, fully automated chemical etcher/asher system offering a comprehensive set of features, enabling reliable high-precision, high-throughput etching/ashing results. Flex 45 is designed to provide maximum flexibility, uniformity, and productivity, while reducing cost and waste of chemical and material.
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