Used LAM RESEARCH Flex 45 #9314597 for sale

LAM RESEARCH Flex 45 is a multi-capable etcher/asher designed to meet the most demanding etch and ashing requirements for critical device structures. Capable of etching and ashing on both planar and 3-dimensional surfaces, Flex 45 offers superior performance over traditional etchers. With an optimized recipe builder, LAM RESEARCH Flex 45 can process any recipe quickly and accurately. This, combined with improved media flexibility, makes Flex 45 the ideal solution for a variety of etch and ashing applications. LAM RESEARCH Flex 45 is designed with an adjustable platform to accurately process various sizes of wafers and substrates, as well as different etch/ashing requirements. It also features a simple and intuitive control equipment, allowing the user to quickly switch between etch recipes or automated run sequences. The etch chamber and edge ring are constructed from aluminum alloy for superior durability, allowing Flex 45 to handle rapid changes in pressure, temperature, and gas flow. LAM RESEARCH Flex 45 is the first etcher/asher to offer a wide range of media flexibility, allowing users to operate multiple etch recipes simultaneously. It is also the first etcher/asher to offer advanced profile control capabilities to reduce over-etching and under-etching. Additionally, Flex 45 is enabled with a hard-coded data-logging feature, providing a detailed record of the recipe setting and activity during the etch or ashing process. LAM RESEARCH Flex 45 also offers a range of advanced safety features, including a built-in safety interlock system and gas sensor. These safety features ensure Flex 45 is always operating in a safe and compliant manner. The safety interlock unit prevents operation of the etcher/asher when the process parameters are set incorrectly, allowing the user to adjust the settings without having to stop the machine. The gas sensor monitors the balance of inert and reactant gases to maintain necessary safety levels and avoid the build-up of noxious fumes. Overall, LAM RESEARCH Flex 45 is an ideal etcher/asher for a variety of etch and ashing applications. It is designed to be safe and reliable, with an intuitive control tool and advanced media flexibility, allowing users to quickly switch between etch recipes or automated run sequences. Flex 45 is sure to meet the most demanding etch and ashing requirements.