Used LAM RESEARCH Flex 45 #9314598 for sale
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LAM RESEARCH Flex 45 is a next-generation etcher/asher specifically designed for large-scale device production applications. With its advanced design, Flex 45 solves a wide variety of device architectures while honing in on precision uniformity, efficiency, and throughput. LAM RESEARCH Flex 45 incorporates an intelligent, flexible cassette-to-cassette equipment that supports improved uptime and assures greater process repeatability. It allows for quick tool setup and substrate load-lock placement, allowing for greater productivity and even less downtime for maintenance/retooling. To optimize process uniformity, standard and custom configurations are available, including: linear pitch, vertical stagger, and bevel/ribbon-style materials. Additionally, the system can accept a variety of stockable ribbon metal materials for both etching and ashing applications. Flex 45 features a powerful process diagnostic unit to monitor the efficiency of all process parameters in real-time. This enables operators to identify process variation quickly, respond to process changes quickly, and implement corrective actions as needed. Additionally, the machine features multiple temperature controllers, enabling multiple stages of stability and reduced temperature drift over long-term runs. Its high-speed digital I/O and Ethernet communication capabilities provide instantaneous readout of process status and results, minimizing errors and increasing output. Finally, LAM RESEARCH Flex 45 incorporates a range of safety features such as auto-shutoff for consumable parts and tool safety alarms, providing operators with assurance of dependable process control while further enhancing uptime. With a combination of these advanced tools, Flex 45 provides a comprehensive etching/ashing asset for high-volume production.
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