Used LAM RESEARCH Flex 45 #9315038 for sale

LAM RESEARCH Flex 45 is an advanced etcher and asher designed for ultra-high etch rates and optimal process uniformity. This device provides superior removal of material layers with Uniflex Direct Etch, while providing exceptional profile and loading control. Flex 45 is also capable of achieving almost any etch chemistry under its wide process range. It offers precision synchronization of multiple process steps in one run, as well as the ability to handle a range of substrates including metal foils. LAM RESEARCH Flex 45 is equipped with a proprietary high-pressure equipment that is capable of delivering up to 90mTorr chamber pressure for more efficient operation. This is combined with an array of electro-magnetically actuated transport stages to deliver fast and accurate subs rate shifting. The optimum process uniformity is achieved through a patented three-zone ceramic gas distribution system, with the capability to accurately target etch transients, both locally and globally. Flex 45 also features a modern closed-loop process control unit that provides accuracy and repeatability for etch processes. This machine includes a process recipe controller, an advanced gas control tool, advanced reporting and tracking of hardware functions, as well as the capability to control multiple substrates in one run. LAM RESEARCH Flex 45 is designed for maximum capability when etching a range of substrates, including thick layers of silicon wafer, flexible substrates, thin films, metal foils, and organic substrates. It offers highly repeatable etch profiles across a wide range of etch chemistries. This can be used for a range of applications including deep etching, high aspect ratio etching, blind etching, and trenching. The device is also suitable for crystal growth, OLED device fabrication, wire bonding, MEMS devices, thin film deposition, and more. Flex 45 is designed with user-friendly software controls and graphical user interface for maximum convenience. Its advanced safety interlock asset also provides an extra layer of protection. This device is also capable of highly accurate high speed production runs with minimal human intervention. With its outstanding process uniformity, combined with its feature-rich control model, LAM RESEARCH Flex 45 is an ideal choice for any etch/ash application needing consistent process reliability and reproducibility.