Used LAM RESEARCH Flex 45 #9315039 for sale

LAM RESEARCH Flex 45 is an advanced etcher/ asher designed for use in a wide range of semiconductor process applications. The equipment is designed to be compact and highly automated, providing an efficient and accurate method for etching sensitive materials. It is constructed with robust materials ensuring a long system life and efficient operation. The unit incorporates an advanced reaction chamber made from stainless steel and is heated to high process temperatures to ensure warranted precision throughout the process. The reaction chamber is equipped with a digital vacuum pressure controller, allowing precise control of the process environment. The chamber also features a spray-type directional injector, providing the ability to effectively etch substrates with uniform etch rates and minimal over-etching. Flex 45 also features a sophisticated process controller with a human machine interface (HMI) allowing for full process control. This control panel supports programmable batch parameters, allowing the operator to store process recipes and recall them as necessary. The controller also offers a full range of process monitoring options, including manual tuning, automatic thermal management, and advanced diagnostics data. The machine also features a particle filter tool, which filters out the particles which may affect etching accuracy and substrate quality. This particle control asset is designed to improve etch accuracy and yield, and reduce the risk of process contamination or other issues associated with particle entrainment. Finally, LAM RESEARCH Flex 45 is equipped with a suite of safety features. These features incorporate emergency shut-offs, safety sensors, and air filters which reduce the risk of hazardous particles entering the usable environment or contaminating the etch/ash process. In summary, Flex 45 offers an innovative and dependable etcher/asher for the semiconductor industry which is designed to deliver a precise etching process and also protect personnel and equipment from potential process hazards. With its sophisticated process control, safety features, and particle filtering capabilities, LAM RESEARCH Flex 45 is an excellent solution for etching sensitive materials.