Used LAM RESEARCH Flex 45 #9315040 for sale

LAM RESEARCH Flex 45 is an etcher/asher designed for advanced semiconductor processing. It is capable of performing a wide variety of etching and ashing processes, including plasma etching, PRAM etching, ion milling, etch back, and more. It is optimized for thin-film etching and ashing processes. Flex 45 is a multi-process equipment equipped with an auto-door gas cabinet. This feature allows for multi-chamber process optimization with a wide range of plasma etching chemistry, process gas, pressure, and system power. This unit is intended for use with single to multiple die packages, making it suitable for a variety of processes and materials. LAM RESEARCH Flex 45 has a modular chamber design, allowing for flexibility with up to 4-chamber configurations. It also includes an Ultra-High Vacuum (UHV) Etch Chamber with an optional turbo pump, enabling deep chamber processes. In addition, the chamber can be configured with an RF/DC and step buss modules for multi-process operation. This machine features a digital low-voltage RF power supply for control of the etching/ashing processes. It is designed for reliable and precise process repeatability based on external or internal wafer mapping. This allows for repeatable wafer-by-wafer yield increases. Additionally, Flex 45 is equipped with a vacuum pumping tool and flushing protocol which helps maintain a clean and excess-free chamber. LAM RESEARCH Flex 45 is designed for reliable operation and durability. It includes advanced diagnostics capabilities and fault tolerance measures to ensure repeatability and longevity of the etching/ashing process. Additionally, it has a touch-screen graphical user interface which gives operators direct control over the etching/ashing processes. This feature helps ensure precise control to increase yield and efficiency. In conclusion, Flex 45 is a highly advanced etcher/asher which is optimized for thin-film etching and ashing processes. It features a modular chamber design, a digital low-voltage RF power supply, an optional turbo pump, and a touch-screen interface. This asset is designed for reliable, repeatable, and efficient operations, making it an ideal choice for advanced semiconductor processing.