Used LAM RESEARCH Flex 45 #9315041 for sale

LAM RESEARCH Flex 45 is a powerful, fast, and flexible etcher/asher equipment, ideal for a variety of micro- and nano-fabrication applications. It delivers a wide range of process options for etch and ash processes, including both wet and dry plasma etching and ash cleaning. The system is capable of etching, ashing, and inactivation of various materials including metals, dielectrics, polymers films, and conductors. Flex 45 offers excellent process repeatability and enables precise control over etch profiles and surface control of the finished product. It features an automated coating control unit that ensures consistency between different runs and stable etch and ash recipes, along with automated parameter adjustments for process optimization. This helps to ensure a consistent process and repeatable results. LAM RESEARCH Flex 45 also features a large process chamber with a wide range of pressures, temperatures, and gas flows available to enable specific process conditions. This makes it ideal for a variety of materials, ranging from metals to dielectrics, as well as a variety of deposition processes such as sputter, evaporation, PECVD, and CVD. The machine also offers flexibility in its hardware configuration. It can be configured to meet customer-specific application requirements, with options for higher powers, larger chambers, multiple chambers, extended bell jars, and other custom-engineered hardware configurations. Overall, Flex 45 is an excellent etcher/asher tool that offers precise control over etch profiles, surface control, and repeatability in many different types of process applications. It is versatile and can be configured to meet customer-specific needs. LAM RESEARCH Flex 45's fast performance, large process chamber, and wide range of process options make it an ideal choice for micro- and nano-fabrication applications.