Used LAM RESEARCH Flex 45 #9351459 for sale
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LAM RESEARCH Flex 45 is an innovative, cost-effective etch/ash equipment that delivers exceptional performance and extreme reliability. This automated system features a single source, integrated hardware and software platform that is easy to use and configure. Its integrated, multi-chamber design provides flexibility and a range of options so that the user can configure the tool to best meet their specific etching/ash needs. Flex 45 provides 9 different process modes, including etching, reactive ion etching (RIE) and ash modes. It also features an open architecture allowing for a high degree of customization. The user can choose from a variety of etching and ash chemistries and chamber configurations to fulfill the specific needs of the application. The unit offers an efficient and precise application of the chemistries and processes to deliver a high-quality etch/ash result. The etching/ash machine includes an integrated, multi-stage load-lock and sample transfer tool that ensures quick and efficient substrate seating and sample transfer. The all-in-one design of the asset eliminates the need to configure multiple components for the etching/ash, leading to faster, more accurate setup and processing. LAM RESEARCH Flex 45 comes with a highly automated feature set and a comprehensive control model that provides superior process control. Through real-time monitoring, the user can adjust the process to achieve optimal results. The control equipment also allows for remote monitoring and data recording to help speed up process development and troubleshooting. Flex 45 is designed with safety in mind, with a touch-screen membrane input system and safety rated process chamber. The all-in-one design of the unit ensures that the necessary safety features are built into the product. Overall, LAM RESEARCH Flex 45 is an ideal choice for etching and ash in production lines and process development labs. With its integrated, multi-chamber design, efficient loading machine, process control tool, and comprehensive safety features, Flex 45 is a cost-effective and reliable tool for etching and ash.
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