Used LAM RESEARCH Flex 45 #9351460 for sale

LAM RESEARCH Flex 45 is an etcher/asher specifically designed for large-scale production and small die sizes. With its sophisticated design and innovative features, it can provide high etch rates, low defect rates, and facilitate increased yields. Flex 45's advanced technology improves the ability of operators to respond quickly and efficiently to the ever-changing requirements of production lines. The equipment's vertical engineering allows the operator to easily change the distance between the twin torches and the base plate, enabling maximum control over the degree of etching and ashing on the wafer while controlling the temperature around the wafer to prevent damage to the edges of the die. Furthermore, LAM RESEARCH Flex 45 allows for precise control over the pressure and temperature of the etch gas which can be continuously monitored using the integrated digital read-out. Flex 45 etcher/asher features a multi-platen cassette system, allowing for the simultaneous etching and ashing of wafers, increasing throughput and reducing cycle times. Its multiple RF coils, integrated into the high-temp quartz tube, enable digital tuning for reliable plasma etching performance. The etching also includes several features that enable the safe operation of the etcher/asher. It has multiple safety safeguards such as its built-in temperature probes and CO2 detonation control valve to ensure safe operation. LAM RESEARCH Flex 45 etcher/asher is designed to fit into most system layouts and mass production environments. Its space-saving design allows it to be a versatile addition to any production line, providing maximum performance and reliability. The ergonomic operator station allows for easy operation and maintenance, while the LCD provides real-time customers with up-to-date etch and asher parameters. For added flexibility, the machine also allows for hardware upgrades such as the addition of multiple process capabilities. Flex 45 is designed to provide the highest quality etching and ashing performance, while its advanced user interface (UI) gives users the ability to quickly review results and make the necessary process adjustments. With its advanced engineering, reliable operation, and flexible design, LAM RESEARCH Flex 45 is the perfect solution for large-scale production and small die sizes.