Used LAM RESEARCH Flex 45 #9358660 for sale

LAM RESEARCH Flex 45 etcher / asher is a high-performing tool for chemical or plasma etching and ashing of various substrates. It is a versatile, cost-effective etching and ashing solution, ideal for a range of applications, such as at-speed, high-throughput etching and ashing; low-temperature etching and ashing; and tight-tolerance etching and ashing. Flex 45 features an integrated RF generator with fully automatic process control to handle the most complex etching and ashing requests. It also features an advanced etch/ash select feature that enables users to fine-tune their processes, allowing them to attain better performance without sacrificing throughput. LAM RESEARCH Flex 45 also offers a fully refurbished sub-system that is designed to optimize both customer process flexibility and efficiency. Flex 45 is equipped with a large, open process chamber, and is capable of handling substrates up to 6 inches in size. Its automated process control system enables users to accurately control etch/ash parameters such as power and substrate temperature in order to achieve the best performance. In addition, LAM RESEARCH Flex 45 features advanced diagnostics that monitor and monitor all processes, resulting in better process control and exceptional repeatability and stability. Flex 45 is offered with a range of etching/ashing chemistries such as oxides, nitrides, and metals. It is also capable of etching/ashing on a wide range of substrates, such as silicon nitride, silicon dioxide, and aluminum. LAM RESEARCH Flex 45 is designed for reliable and repeatable operation, and offers exceptional process control that ensures optimal performance. Finally, its small footprint allows it to easily fit into any laboratory or manufacturing facility.