Used LAM RESEARCH Flex 45 #9358663 for sale

LAM RESEARCH Flex 45 is a state-of-the-art etcher/asher designed for the semiconductor industry. It features a dual-source plasma equipment, allowing for optimal deposition of on-wafer materials. It is a fully automated system, incorporating a loadlock that allows for rapid wafer changes and an auto-flush that keeps the process chamber clean during long production runs. Flex 45 utilizes precision-controlled infrared sensors and advanced control software to precisely monitor the processing environment. LAM RESEARCH Flex 45 has a process chamber with an interior of .85m2, set at a pressure of 200pTorr. It also utilizes an advanced RF matching network and software controls to precisely adjust the optimal RF power for each process recipe. This result in very high process stability and repeatability as well as improved plasma uniformity and better plasma-induced low frequency noise. Flex 45 is designed to achieve the highest standards of quality and reliability. It is designed to incorporate a number of advanced safety features, such as E-Stop safety interlock, with auto-recovery after emergency shutdown, as well as a full suite of external and internal interlock systems. Its predictive health monitoring also guarantees uninterrupted production. LAM RESEARCH Flex 45 also features a high-performance, highly efficient gas distribution subsystem. It can support up to four gas sources simultaneously, and is designed for low-cost per-wafer gas consumption. It uses a robust gas distribution network, as well as a proprietary gas purging unit to reduce particle generation and maintain process purity. Flex 45 also includes a recipe manager machine, enabling users to manage, store and analyze recipes in the database and use them to configure process steps. This helps to improve tool utilization and maintain tool uptime. Finally, LAM RESEARCH Flex 45 is backed by LAM RESEARCH dedication to customer service and satisfaction. It is backed by a full range of customer support services and comes with a one-year warranty. In short, Flex 45 is an excellent choice for your etching and ashing needs.