Used LAM RESEARCH Flex 45 #9358666 for sale

LAM RESEARCH Flex 45 is an advanced etcher and asher solution designed for a wide variety of applications such as deposition, etching, planarization, and contact exposure. It is a powerful and robust platform that can accommodate substrates up to 12 inches and a maximum of 4 wafers. Flex 45 utilizes Plasma Expression™ technology to help achieve the ideal etching and ashing performance and repeatability, with absolute defect-free operation. Additionally, the equipment is equipped with the latest safety features for improved process and operator safety. LAM RESEARCH Flex 45 is designed for high-reliability performance and production efficiency with a wide range of options for enhanced performance and productivity. It features an advanced controller which provides real-time process optimization and integration, with dynamic process control. The process gas control system is capable of backside substrate heating, and supports a wide range of process recipes and profiles which can be easily transferred between systems. The unit is also equipped with an automated wafer handling machine which can transfer up to 4 substrates simultaneously. The integrated automation technology inside Flex 45 also ensures the repeatability of the etching and ashing processes. LAM RESEARCH Flex 45 also features a double-walled plasma reactor with a 7-sensor array for temperature measurement and uniformity control. This allows precise adjustment of plasma parameters with automatic alignment and real-time evaluation of plasma uniformity. Flex 45 also comes with an advanced safety interlock tool which includes multiple levels of safety and emergency controls, as well as high pressure microwave generator control and emergency shut-off. In terms of productivity, LAM RESEARCH Flex 45 features a high-efficiency wafer transfer asset for improved throughput, as well as an automated data logging model for process validation and optimization in real-time. The equipment also includes a proprietary Recipe Optimization™ (RO™) technology which allows users to quickly identify the optimal process recipe and maximize throughput without sacrificing process quality. Overall, Flex 45 is an advanced etcher and asher solution designed for high-reliability performance and production efficiency. It features an advanced controller with real-time data collection, a double-walled plasma reactor with 7-sensor array for temperature tone and uniformity control, and an automated wafer handling system for improved throughput. In addition, LAM RESEARCH Flex 45 includes a Recipe Optimization technology to ensure optimal process recipes and maximize throughput, as well as a comprehensive safety interlock unit and emergency shut-off for improved process and operator safety.