Used LAM RESEARCH Flex 45 #9358687 for sale

LAM RESEARCH Flex 45 is an etching and ashing machine designed primarily for semiconductor fabrication applications. It is capable of etching a variety of materials from silicon and compound semiconductors to aluminum and gold. Its unique design features a thermal source and multiple vacuum chambers, and can process any size wafer up to 8" in diameter. Flex 45 also features the ability to control etch rates, selectivity, and achieves a high degree of precision. LAM RESEARCH Flex 45 is driven by a motion control system which automatically sequences the sequence of process steps, including RF bias and process gas control. Automatic wafer pre-alignment is also provided to ensure uniform loading of substrates across each process chamber. The machine is also interfaced with a proprietary software package for recipe development and operator control. The etching of a semiconductor wafer is an extremely complex and delicate process which requires precise control over the etching parameters. Achieving ideal conditions requires precise control over the temperature, power, and gas flow rates. Flex 45 employs a versatile range of reliable and well-tested technologies, such as RF energy, magnetron sputtering, and plasma etching. Additionally, the machine features an integrated Differential Pressure Sensor (DIPS) which precisely monitors the etching process conditions. LAM RESEARCH Flex 45 is capable of etching silicon wafers, as well as compound semiconductors such as Silicon germanium and Gallium Arsenide. It can also be used for etching hard metals, such as aluminum and gold. Flex 45's process module is designed to be easily integrated with a variety of process modules, allowing for a high level of flexibility for customizing etching processes. LAM RESEARCH Flex 45 is designed for performance, with the goal of achieving the highest quality etching at the most efficient possible cost. The machine is built with safety and environmental protection in mind, in accordance with the highest standards in the industry. Flex 45 is a great choice for an etching and ashing system, providing precise control over etch processes and flexibility for custom recipes.