Used LAM RESEARCH Flex 45 #9358689 for sale

LAM RESEARCH Flex 45 is a state-of-the-art etcher / asher equipment providing high precision and accuracy with fully-integrated plasma etching and wet etching techniques. This high-performance tool is designed to support optimal etching processes for various materials, such as semiconductor, MEMS, and solar cells among others. It features a powerful single-wafer level automated wafer-handling capability, meaning that multiple etching procedures may be set for a single wafer, allowing for high throughput. Flex 45 features superior placement accuracy of critical geometries, enabling tight process control. This accuracy is achieved through a highly precise and reliable wafer transfer system, coupled with an advanced electrode positioner to provide exceptionally precise ablation profiles. Furthermore, LAM RESEARCH Flex 45 features an array of aberration-correction tools, allowing for optimized control of etch profiles. Flex 45 is equipped with a Dual-Stage, Pulsed-DC plasma generator, capable of generating high-density oxygen plasmas and can be used for both high-density plasma etching and wet etching applications. The unit also offers a wide range of etchant chemistries and its automated wafer-paced etching capabilities make it suitable for high-volume production. In terms of ease of operation, the user friendly, intuitive graphical user interface of LAM RESEARCH Flex 45 makes it extremely simple to set up, monitor etch processes and collect data for analysis and process optimization. In addition, the tool routinely monitors and evaluates data in real-time, facilitating optimized process results. Flex 45 is capable of etching very large geometries via its all-around electro-mechanical alignment functions, providing the user with utmost flexibility. The tool is also equipped with an advanced vision machine for accurate vertical alignment, allowing for high-precision etching of even the smallest features. Overall, LAM RESEARCH Flex 45 is a powerful and versatile tool used for etching and wet etching applications that offer precision and accuracy along with high throughput. It is ideally suited for numerous industries, such as semiconductor, MEMS, solar cells and many others.