Used LAM RESEARCH Flex 45 #9379094 for sale

LAM RESEARCH Flex 45 is a high quality etcher/asher designed for high performance plasma etching and ashing applications. This equipment is equipped with a 3.2 meter chamber and has a 45 cm hexagonal platen. It offers the highest throughput, with a maximum load of 40 substrates, a 10 cm distance between each substrate and a multi-step etch/ash recipe capability up to 18 layers deep. Flex 45 also provides superior uniformity and feature definition control, while being extremely reliable and economically priced. The system is equipped with several advanced plasma processes, such as RF/DC/DC Reactive Ion Etching (RIE). It is designed for advanced etch and ash profiles with up to 18 layers of repeatable, defined feature definition. The plasma source used with RIE is a two-stage, two-frequency RF source with a pre-ionizer to minimize passivation effects and enable good uniformity. Additionally, this unit offers dynamic frequency tuning and pulsing capabilities to the machine to achieve superior etch and ash profiles. LAM RESEARCH Flex 45 is also equipped with enhanced in-situ cleaning capabilities that enable high quality cleaning of advanced pattern surfaces. This includes chamber wall coating and de-tune protection, and nitrogen-based particles and gas-phase etching. The tool is also capable of a wide range of processes such as in-situ cleaning, chamber wall baking and sputtering to ensure superior performance and high-quality results. Flex 45 is a highly reliable etcher/asher and is capable of ultra high precision and accuracy, with incredibly repeatable results. The asset is equipped with 4" touch screen display with graphical user interface (GUI) for ease of operation. It is housed in a dust-proof and dust-resistant cabinetry for enhanced protection and safety. Additionally, it is also equipped with a remote monitoring model for remote support and access over the web. This equipment is also backed by a comprehensive service and support program to ensure maximum uptime and peace of mind.