Used LAM RESEARCH Flex 45DD #9011013 for sale

LAM RESEARCH Flex 45DD is an etcher / asher designed to accommodate a variety of production needs. It is ideal for semiconductor wafer processing in wafer bonding, surface film preparation, and oxide etching, among other uses. It features a PECVD chamber, allowing it to deposit conformal silicon dioxide and silicon nitride on wafers, as well as the ability to perform reactive-ion etching (RIE) for more precise patterned and defined features. The flexible design of Flex 45DD allows it to be used in a wide variety of production settings, including flexible, continuous, batch, cluster tool, and isolated asher applications. LAM RESEARCH Flex 45DD utilizes a production area of up to 15,000 wafers, with a maximum throughput of up to 380 wafers per hour. This etcher/asher features a universal PECVD chamber with independent flow control valves, allowing for precise control of gas flows, pressures, and temperatures. It also includes a programmable wafer handling equipment, with adjustable temperature and pressure settings, adjustable gap control, wafer rotation, and a recipe-driven automated tuning mode. This allows for precise processing of a variety of substrates and wafer types. Furthermore, Flex 45DD is compatible with a wide range of inspection and metrology systems, providing accurate measurements of the etching and deposition processes. LAM RESEARCH Flex 45DD is also reliable and safe to use, due to its design features and integrated system safeguards. It features highly integrated control unit with a host of built-in diagnostic and safety features that automates process and ensures that the machine stays in compliance with the factory safety regulations. The tool also features a vacuum chamber with integrated overhead clearances and safety interlock systems to prevent accidents during operation. Additionally, a laser ablation chamber cleaning asset is employed to ensure optimal production performance, while built-in systems protect both the tools and users from long-term damage due to power outages and overloads. In conclusion, Flex 45DD is a reliable and efficient etcher/asher ideal for semiconductor wafer processing. With its flexible design, PECVD capabilities, adjustable gap controls, wafer rotation, and automated tuning mode, it can quickly and accurately process a variety of substrates and wafer types. It also features a host of built-in safety features to ensure efficient and safe operation of the tool.