Used LAM RESEARCH FLEX DS #293628303 for sale

LAM RESEARCH FLEX DS is a fully-integrated Multi-Process Etcher/Asher equipment developed by LAM RESEARCH. It is an advanced system that is capable of carrying out a variety of processes, such as etching, ashing, cleaning, stripping, and surface preparation. The unit is designed with safety and productivity in mind, with a simplified architecture that ensures maximum throughput and minimal downtime. The machine consists of three modular components: the process module, the thermal power tool, and a controller. The process module is composed of two chambers, the mains chamber and the buffer chamber. The mains chamber is fitted with multiple process gases, electric power, and vacuum ports and is used for loading and unloading wafers. It also houses the gas delivery asset and the process radio frequency (RF) power supply. The buffer chamber uses thermal control to achieve optimal temperature uniformity and process uniformity. The thermal power model, which is composed of an AC/DC generator and a solid-state-controlled high voltage switching module, is responsible for providing the power supply necessary for etching and ashing processes. It ensures consistent output voltages and frequencies, while protecting the equipment from voltage surges and other electrical abnormalities. The controller module is equipped with an intuitive touchscreen control panel that allows the operator to monitor and adjust process gas flows, RF power, chamber conditions and temperature/pressure settings. It also includes a built-in database for data recording and review, as well as a library of recipes for different process demands. In addition, it provides a library of additional features such as recipe management, machine and tool diagnostics, and system control. FLEX DS is capable of performing etching and ashing processes on a variety of substrates, such as Si wafers, flat panel displays, and 3D printed parts. It also includes a vacuum monitoring unit that ensures maximum process uniformity and cleanliness. This machine is designed to maximize process repeatability and flexibility, while reducing the time spent on maintenance and setup.