Used LAM RESEARCH FLEX DS #293636663 for sale

LAM RESEARCH FLEX DS is an advanced etcher/asher tool used in the semiconductor and other advanced industries for creating microstructures and other complex structures. This tool offers process uniformity, in terms of both profile creation and profile maintenance. FLEX DS has the capability to execute multiple etching or ashing processes simultaneously with high throughput and process precision. The tool combines thermal CVD and plasma etching/ashing technologies in a multi-chamber configuration with a single wafer transfer mechanism for high uniformity and process consistency. LAM RESEARCH FLEX DS has a 15 inch open-load, dual mini-constriction transport system for high throughput. It also has an integrated vacuum system and multi-chamber architecture enabling multi-pass etching with programmable recipes based on the requirements of each layer or feature. For those applications where high selectivity is required, an optional VHF chamber is available for higher plasma quality and improved feature etch selectivity. FLEX DS is also equipped with the latest real time data acquisition and control systems for precise analysis and automated process control. This includes a four pocket mass flow controller, quad or octal Photon Deposition exposure systems, and process gas delivery and monitoring. It also features an operating environment with powerful automation tools that provide automatic layer-by-layer control and process consistency. LAM RESEARCH FLEX DS systems are available in several sizes and configurations to meet the specific needs of different applications. Its process technologies are designed to meet the most demanding requirements of patterning and deposition for high yields and uniformity. FLEX DS system has been integrated into several industrial-level production processes, providing customers with reliable, repeatable high-yield solutions for device fabrication.