Used LAM RESEARCH FLEX DS #9270877 for sale

LAM RESEARCH FLEX DS is an etcher/asher designed for advanced process integration and user flexibility. This equipment is an innovative and economical solution for creating critical, high-quality structures on substrates such as silicon, glass, quartz, metals, etc. FLEX DS has a state-of-the-art chamber design which provides tight process control and maximum flexibility by allowing users to tailor process recipes to their specific needs based on the substrate used and the desired result. The system is equipped with a 5-dimensional in-situ process control unit, which ensures that processes are run correctly and with consistent results. The excellent uniformity of the etching and ashing process results in precise dimensional control, providing the users with the ideal balance between quality and repeatability. Pressure stability and chamber cleanliness are also ensured, which enables long-term, reliable, clean process results. This powerful and economical etcher/asher is constructed from high-grade components including an advanced quartz showerhead, a five-arc shutter machine, and an advanced ultra-reliable vacuum pump. The vacuum pump's performance is monitored to ensure precise process control and to optimize pump longevity. LAM RESEARCH FLEX DS also provides fast run-up times and excellent wafer loading capabilities. This tool enables flexible production scheduling as the chambers can be temperature ramped up or down. Furthermore, FLEX DS has interchangeable chambers that can be swapped out as needed. The combination of these powerful features makes LAM RESEARCH FLEX DS an ideal solution for any etching or ashing application. FLEX DS is designed with safety and user-friendliness in mind. The asset includes an enclosed etching/ashing chamber, an autofocus model which automatically monitors the focus of the optics, and a Programmable Logic Control (PLC) which is designed to provide automated safety features and intuitive operator control. To summarize, LAM RESEARCH FLEX DS is a powerful and economical etcher/asher that offers fast run-up times and precision process control. This equipment is designed to handle all applications requiring etching and ashing and offers a flexible solution for any need. The safety features, user-friendly design, and the interchangeable chambers make FLEX DS an efficient and reliable choice for any project requiring etching or ashing of substrates.