Used LAM RESEARCH FLEX DS #9271261 for sale

LAM RESEARCH FLEX DS is an etcher / asher designed for the fabrication of semiconductor circuits. Using reactive ions and advanced etching and cleaning techniques, it creates etched patterns of desired features on substrates. It also offers a variety of deposition techniques for the formation of dielectrics layers and the deposition of barrier/grains metals, adhesion layers, dielectrics, barrier films, and more. FLEX DS is equipped with an advanced dual-source and dual-frequency plasma source, which can be adjusted to provide optimal etching and deposition processes and results. It also features a multi-frequency operation mode so that various process recipes can be used for different types of substrates and job assignments. The equipment is designed with a multitude of recipe parameters to ensure tight process control and a high degree of precision. LAM RESEARCH FLEX DS etcher includes a chamber monitoring system to ensure uniform etching in both source and target areas. It comes with a patented Edge-Detection Unit that automatically detects and eliminates etch steps on substrates' edges. The advanced sensoring technology also ensures low particle retention and wafer damage. The etcher is extremely versatile and includes multiple process types for dry and wet etching, deposition, deep etching, photoresist etching, plasma-enhanced chemical vapor deposition (PECVD) and barrier films etching. It can also handle a wide variety of substrates such as silicon, GaAs, sapphire, glass, and other materials. FLEX DS also features an internally developed machine architecture with an advanced user-friendly interface, allowing easy tool control and recipe management. To maximize the asset's efficiency and productivity, LAM RESEARCH FLEX DS etcher has been designed for easy maintenance, process monitoring, and integration into existing factory management and production control systems. It features dynamic equipment status monitoring, detailed throughput and yield data, and customizable batch reports. Additionally, FLEX DS etcher includes an advanced fleet management model which enables automated resource allocation. This reduces operator time lost due to manual decision-making. To summarize, LAM RESEARCH FLEX DS is a highly advanced etcher/asher designed for the fabrication of semiconductor circuits. It is equipped with dual-source and dual-frequency plasma sources, allowing improved etching and deposition processes. The equipment also includes a multitude of parameters, a monitoring system, edge detection unit, various process types, a fleet management machine, and custom reporting. All of these features make FLEX DS an ideal solution for companies needing reliable and efficient semiconductor etching and ashing capabilities.