Used LAM RESEARCH FLEX DS #9315257 for sale

LAM RESEARCH FLEX DS is an advanced etcher / asher configured to deliver high throughput and process consistency. It is designed to meet the needs of small research projects and is appropriate for applications including plasma surface treatment, etchback, oxide etching, and chemical vapor deposition. FLEX DS utilizes a large process chamber and has a proprietary three-zone gas delivery system that is specifically designed to provide uniform, isotropic etching to create acoustic, optical, and electronic structures. The process chamber also provides a wide range of plasma power density, allowing for highly efficient etch rates and precise layer depth control. LAM RESEARCH FLEX DS boasts a very low particle generation rate, making it suited for applications requiring very high levels of cleanliness such as medical device manufacturing. Additionally, its automated control system and integrated software allow for easy optimization of recipes for specific substrates and process conditions. FLEX DS utilizes an insulation technology to contain the high process pressure and to minimize thermal imprints on substrates. This insulation technology is designed to efficiently stabilize the interior of the chamber, reducing fluctuations in temperature, power density, and pressure which can have detrimental effects on the etching or ashing process. LAM RESEARCH FLEX DS has a simple, modular design that enables easy maintenance and troubleshooting to reduce downtime. The process chamber can be opened without the need for tools, and it safely handles hazardous gases with in-chamber chemical delivery and exhaust evacuation. The system also has a built-in diagnostics program to detect possible performance issues before they become critical. Overall, FLEX DS is an advanced etcher / asher with the capability to perform a wide variety of processes with precise control and excellent performance. It is highly efficient, reliable, and safe, and it is designed to serve the needs of research projects.