Used LAM RESEARCH FLEX DS #9358667 for sale

LAM RESEARCH FLEX DS is an advanced etcher/asher equipment designed to meet a variety of needs. The machine is highly modular and can be tailored to the exact needs of the customer, including compatibility with most types of chemistry. It incorporates advanced dual-stage etching to provide precision etching and ashing capabilities with excellent profile control. The system is engineered for high throughput and offers excellent versatility and modularity. On the front end, the unit integrates a material handling chamber and optimized wafer loading/unloading systems to ensure maximum load productivity. It works with both frame and contact transfers, and allows for multiple configurations of output pallets, as well as compatibility with standard pallets and cassette sizes. On the back end, the machine offers a comprehensive range of etching and ashing technologies. Features include: chemical process chambers, platen heater tool, chambers for hazardous waste, venturi vacuum pumps, process control unit, advanced gas control systems, and several other essential process control functions. The asset also includes a complete library of recipes, allowing the user to customize the etching and ashing parameters to the exact process needs. The recipes are organized into categories, so the user can quickly locate the best recipe for their specific needs. FLEX DS is also designed with safety in mind. It includes sophisticated safety features, such as remotely monitored process monitoring, to ensure the safety of the operator. Additionally, the model includes a highly visible sampling port, to maintain a safe and clean environment, and is designed to operate in compliance with global worker safety laws. LAM RESEARCH FLEX DS is an advanced etcher/asher equipment suitable for a wide range of applications. It offers excellent versatility, precision etching/ashing, high throughput, and a comprehensive recipe library. Moreover, it is designed with safety in mind and built with sophisticated safety features.