Used LAM RESEARCH Flex Fx #9270876 for sale

LAM RESEARCH Flex Fx (etcher/asher) is a step ahead in ashing and etching capabilities for the semiconductor industry. Its compact footprint and multiple configurations make it a choice for many different integration scenarios. Flex Fx is designed for precision and uniformity in etching and ashing oxide layers, while maintaining the tight process and temperature control that is critical for accurate optimization of lithography and advanced device formation. LAM RESEARCH Flex Fx is specially designed for high volume production, and provides unparalleled throughput with a wide range of HF chemistries. The etcher/asher's source supplies are available in both load-lock and fixed install configurations, allowing for high flexibility in different types of substrates. The powerful RF generator offers highly efficient plasma control for precise process tuning. The N2/O2/He gas ring provides uniform, tight process control. The closed-loop gas source system also maintains a stable pressure balance and gas flow to ensure stable process results. Flex Fx comes with a large clear-view chamber that supports up to six 8-inch wafers, providing maximum processing efficiency. A specially designed top-protection ring helps shield the top of the chambers for better reliability and repeatability. The unit also features two optional CoolPAS delivery systems that add process flexibility and repeatability. LAM RESEARCH Flex Fx provides reliable and repeatable processes at the speed and accuracy required for today's demanding semiconductor projects. Its robust build and high-end features make it ideal for any development or production environment.