Used LAM RESEARCH Flex Fx #9311093 for sale

LAM RESEARCH Flex Fx is an advanced, multistage etcher/asher designed for flexible substrates such as polyimide, oxide, metal and glass. Its unique design allows users to etch and/or asher a variety of materials, including Al, Ga, and Si using a single chamber. Flex Fx is equipped with a multi-zone plasma source, which allows for independent control over the type of etching or ashing, as well as precise adjustment and adjustment of the etching/ashing voltage, current and gas chemistry. LAM RESEARCH Flex Fx also has an automated "SmartMow" system for critical pattern registration and alignment. Flex Fx features an integrated two-zone thermal processing capability. The heating zones, supplemented by bypass-cooling capability, can achieve temperature ramp rates up to 20°C/second, enabling time-critical processes such as high rate etching and orienteering of substrates. The extremely fast cooldown rates enable multiple deposition processes to be performed in rapid succession. The user also has the option of overriding the ramp-rate for specific process requirements. LAM RESEARCH Flex Fx has a range of charge limiters to ensure that a sample is subjected to reasonable, even distribution of power, providing uniform, high-quality etching/ashing results. It is also equipped with an advanced, field-dependent gas distribution system, which is monitored by a LCD panel for reliable performance. Flex Fx comes with a comprehensive software package, including an intuitive, graphical user interface. The user can program the control unit to perform custom recipes, while the automation capabilities enable automatic switching between etching and ashing processes. LAM RESEARCH Flex Fx is also compatible with multiple network protocol systems, ensuring seamless integration with other automated equipment. In conclusion, Flex Fx is an advanced, multistage etcher/asher ideal for producing high-quality results on flexible substrates. Its advanced features enable precise control over etch/ash parameters, while its built-in automation capabilities facilitate rapid process switching and quick throughput.