Used LAM RESEARCH Flex GX #9261810 for sale

LAM RESEARCH Flex GX
ID: 9261810
Wafer Size: 12"
Vintage: 2016
Systems, 12" 2016 vintage.
LAM RESEARCH FLEX GX is a precision etch/ash equipment designed specifically for the semiconductor, MEMS, and related industries. The system is capable of repeatable and customizable process performance, providing significant throughput improvements over manual and discrete processes. FLEX GX unit features a reliable low-frequency, high-precision, high-performance driver and a patented forced-air cooling machine to help maintain consistent tool temperature. The tool also includes a patented dual ablation head, allowing it to etch two components at once. The second ablation head offers significantly higher etch rates and shorter etch times, making it ideal for larger and complex components. LAM RESEARCH FLEX GX asset is designed to optimize accuracy, repeatability, and throughput. It uses a direct vision imaging model and employs advanced methods to achieve micron-level accuracy and repeatability. The use of a vision equipment provides a convenient and accurate way of characterizing material surfaces prior to etch/ash processing. FLEX GX system also offers advanced process control, allowing users to enhance productivity and tool performance. The unit is suitable for applications including: semiconductor device fabrication, MEMS device fabrication, optical device fabrication, and complex packaging. The machine is also capable of etching metals including gold, copper, aluminum, titanium, and other non-metals. It offers a versatile etching process that allows for greater control and precision in shaping materials. The combination of precision, repeatability, and throughput capabilities make LAM RESEARCH FLEX GX tool an ideal solution for etching / ashing requirements in the semiconductor industry. The asset's versatility and flexibility make it suitable for a wide range of ASM, lithography, and etching / ashing processes. The model offers a robust and reliable etching / ashing solution for industries that demand the highest level of process control.
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