Used LAM RESEARCH IGS #9157986 for sale

Manufacturer
LAM RESEARCH
Model
IGS
ID: 9157986
Gas box.
LAM RESEARCH IGS (Integrated Geometry Equipment) is an etched/ashed deposition system designed for wafer processing. It combines several etching/ashing technologies in a single platform to create advanced patterned layers. Its advanced process control ensures material uniformity and repeatability for critical applications. IGS platform is equipped with an ACPI auto-profile control that searches for pattern density and profile changes in deposited material and makes process adjustments to ensure layer accuracy. It also includes a background enhancement unit that halts the etching process in areas with a dense amount of particles or near the bottom of the process chamber. These preventative maintenance features optimize etching precision and ensure material uniformity. LAM RESEARCH IGS machine is also designed for multi-step etching. It allows users to perform composite etching with several chamber passes, creating complex patterns with little amount of material. It also has the capability to detect and discontine etching steps that require complicated designs or uneven accuracy, minimizing the amount of time spent. For larger applications, IGS can be combined with either LAM RESEARCH SMO (Sentry Monitor Oasis) or ELS-A (Edge Lead Strip Automation) systems. These automated systems allow users to apply layer inclusions and exclusions to accommodate device integration requirements and advanced sources and designs. LAM RESEARCH IGS also offers process traceability, allowing operators to customize data-driven workflow procedures to meet customer specifications. Through this feature, users can track production records, yields, trends, and environmental data. IGS provides economical and reliable etching/ashing capabilities that facilitate the advanced patterning and deposition processes for a variety of critical wafer applications, ensuring successful device integration. Its advanced automation features, process control capabilities, and data-driven traceability tool make it an invaluable design tool.
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