Used LAM RESEARCH IGS #9157991 for sale

LAM RESEARCH IGS is a type of etcher and asher used to fabricate micro and nano scale integrated circuits. It is a multifunctional etcher designed to etch, clean, sputter, deposit, and asher wafers in a single tool. IGS has advanced features such as high etch precision and uniformity, low particulate levels, and optical cycle monitoring. LAM RESEARCH IGS operates in a vacuum chamber that enables the etcher to control the endpoint of the etch cycle as well as improve uniformity. IGS etcher is capable of providing up to 5,000 sccm of etch gas flow. An ICP sputter source is used to deposit thin films of metal onto the wafer surface, creating an interconnect structure. The sputter source enables depositions on a variety of materials such as aluminum, titanium, copper, and gold. LAM RESEARCH IGS is equipped with a single wafer ashing chamber, which is used to remove photoresist after etching. The wafer is loaded onto the ashing chamber, and then is exposed to high-temperature plasma ashing. This process removes the photoresist, allowing for high precision etching. IGS is designed to provide precise etching and ashing process control. The etcher software features a recipe editor, which allows the user to specify etch parameters, such as gas mixture, pressure, temperature, and other process parameters. A real-time process monitoring system is integrated to measure the etching and ashing process parameters that enable process optimization. LAM RESEARCH IGS has multiple safety features and hard-ware controllers to ensure process accuracy and safety. These features provide process protection mode, emergency stop button, and error alarms that prevent any damages to the system and wafer. IGS is compact and integrated with a small foot-print, making it easy to install and use in any laboratory environment. Overall, LAM RESEARCH IGS is an advanced etcher with features that enable precision etching and ashing, reducing particulates and obtaining high throughput. IGS is equipped with numerous safety features and instrumentation that ensure wafer integrity and process accuracy. It is an ideal tool for fabricating micro and nano scale integrated circuits.