Used LAM RESEARCH Inova #293610305 for sale

LAM RESEARCH Inova is a highly advanced etcher / asher used for critical etching and drying processes. This equipment is ideal for advanced wafer processing in the semiconductor industry. Its integrated design is capable of delivering superior performance with high throughput and superior quality control. Inova boasts a powerful IGI power supply control system and robust heating and cooling elements to provide precise temperature and power control. The unit is capable of controlling process parameters such as pressure, reaction time, and temperature to ensure uniform etch rates and superior process consistency. The integrated design also includes a highly accurate mass-flow controller to accurately measure the critical precursor gases used in the etching process, providing a precision that leads to improved process yield. In addition to its advanced gas control capabilities, LAM RESEARCH Inova also offers advanced material choice and cleanliness control. Its Advanced Gas Cleanliness Module provides particle-free process gases, ensuring a pristine etching environment and reliable etching of advanced substrates. The machine also offers the ability to select substrates from a wide range of materials, allowing the user to customize the process for different device applications. Inova is supported by extensive software packages designed to provide process intelligence, enable data logging, and facilitate recipe setup and revision. Its intuitive human-machine interface (HMI) is designed for easy use and ensures users are kept abreast of all tool activity. LAM RESEARCH Inova also offers an Automated Process Control (APC) asset, providing real-time process monitoring, tight process control and valuable information for process optimization. In addition to having an integrated high-efficiency design, Inova is also extremely efficient when it comes to energy consumption. The model efficiency is enhanced further with its versatile exhaust design that allows users to customize their environmental footprint to meet their needs. LAM RESEARCH Inova is also designed to be maintenance friendly, reducing downtime and improving reliability. In addition to its impressive capabilities, Inova is also extremely affordable. Its robust design and advanced features make it a cost-effective solution for any semiconductor etching and ashing process. With its integrated design, advanced process control, and cost-effectiveness, LAM RESEARCH Inova is an ideal choice for etching and ashing processes in the semiconductor industry.