Used LAM RESEARCH Inova #293610306 for sale

LAM RESEARCH Inova is a modular etching / ashing system designed for specific etching and ashing processes. It is an ultra-stable platform that can surpass all standard etching processes and provides optimized accuracy. Inova provides optimal etch depth, improved resolution and minimized contamination, offering reliable and durable performance. LAM RESEARCH Inova is equipped with two 200-sccm high-performance gas sources (He, Ar, N2 and O2), two quartz reaction chambers and two automated sample holders that allow full flexibility with sample placement. It also features a reliable source cleaning capability, with an integrated high-flow water bath that helps reduce the need for chemical solvents. Inova features an innovative etch predict controller and software, which offers enhanced accuracy and flexibility in etching control.The etch predict controller continuously monitors the etch rate and adjusts the process parameters for greater precision. This allows for higher yields and reduces waste and substrate damage. The standard LAM RESEARCH Inova modules also feature a multi-trigger system, which allows up to five independent etch processes to be activated in a single cycle. This makes it ideal for complex etching / ashing applications requiring high throughput. The optional Collimated Ion Beam Assist (CIBA) feature enables superior control of the ion flux for time-critical Sample Analysis Processes (SAPs). In addition to its advanced etching technology, Inova offers a comprehensive range of safety features. These include features such as an acoustic cabinet, ion trap, ion chamber, and multiple intake and exhaust flanges, which help keep the system clean and safe during operation. Overall, LAM RESEARCH Inova offers unparalleled performance in etching and ashing. With its advanced etch predict controller and its comprehensive range of safety features, Inova enables users to create unique etching / ashing solutions to meet their specific needs.