Used LAM RESEARCH Inova #293610308 for sale

LAM RESEARCH Inova is an advanced etching and ashing equipment featuring high throughput and precision process control. It is the latest equipment in the market and it provides the highest degree of accuracy and reliability when performing etching and ashing processes. Inova system is designed to handle a wide range of etch and ash process tasks. It is engineered with an advanced ultra-high velocity sputter etching/ashing mechanism, making it capable of delivering quality etch and arbitrary ash feature widths at higher step-overs and resolutions than any other commercially available etcher/asher unit. This feature gives LAM RESEARCH Inova a high level of process control and repeatability, and it is well suited for semiconductor manufacturing applications. The machine offers various process options including Etchback, Mechanized Etch, and Reactive Ion Etch (RIE). It also features advanced Plasma Enhanced Chemical Etch (PECE) capabilities, allowing for greater flexibility in process conditions and an allowance for adjustments over time (even when the chamber is in-vacuum). Inova also has a wide range of customizable features such as the Adaptive Process Control (APC), Advanced Profile Control (APC) and Adaptive Profile Control (APC) technologies. These features allow users to alter their process sequence on the fly and to fine tune their process parameters to their requirements. In addition, LAM RESEARCH Inova features an Automatic Recipe Loading tool, which enables users to easily transition from one process to another by loading a user-supplied recipe into the controller. This improves throughput and reduces the need for operator intervention. Inova also boasts an extensive library of etch recipes, including custom-tailored solutions, as well as its own internal recipes to allow its users to achieve their desired etch and ashing conditions with ease. Moreover, with its intuitive and easy-to-use interface and user-friendly graphical user interface, LAM RESEARCH Inova offers a simple and straightforward way of controlling the process—even with limited operator experience. Inova is a powerful tool for both etch and ashing, providing the highest level of process control and flexibility for the user. With its robust and reliable design, LAM RESEARCH Inova is an ideal solution for a wide range of semiconductor applications.