Used LAM RESEARCH Inova #293662993 for sale

LAM RESEARCH Inova is an etcher / asher designed to provide highly efficient, accurate etching of ceramic, polymer substrates, and glass. Inova is the leading dry etching machine for applications such as wafer thinning, dielectric layer etching, laser drilling, and reactive ion etching (RIE). It is designed to handle a variety of wafer sizes, from 200mm down to 150mm and 2 inch to 6 inch. LAM RESEARCH Inova is designed to provide precise control over etch rates and deliver higher yields in advanced etching processes. Inova is an advanced etcher with industrial-level capabilities. LAM RESEARCH Inova can be outfitted with a number of different tools for a variety of processes. It features a fully automated robotic system for handling wafers. It also includes a plasma source module to enable high-rate etching. Inova is also capable of integrating with other tool components such as stepper motors, metal spindles, as well as a number of different imaging and metrology systems. LAM RESEARCH Inova offers precise temperature control and pressure control throughout the etching process. This helps to ensure accurate etching results. Additionally, Inova also offers a full range of process gas control. This gas spectrum control offers flexibility for many different applications. LAM RESEARCH Inova is also designed to be robust when dealing with substrate and process contamination. Inova includes optional high precision loading and unloading stations that allow for fast turnaround times. LAM RESEARCH Inova can also be automated and monitored remotely to ensure quality and reliability in the etching process. The etcher can also be used across a range of applications and industries such as semiconductor manufacturing, MEMS fabrication, and solar cell manufacturing. Inova is an advanced tool that offers consistent and repeatable performance for a number of etching processes. This reliable and accurate machine is designed to ensure higher yield rates and better results. Additionally, LAM RESEARCH Inova is an all-in-one etching system that offers flexibility and control. These features make Inova the ideal tool for a variety of applications.