Used LAM RESEARCH Kiyo EX #293824451 for sale

LAM RESEARCH Kiyo EX is a high-performance, next-generation etcher designed for advanced device manufacturing applications. It has the capacity to etch essentially any material types such as silicon, glass, and metal up to 1 micron in size. The equipment features a state-of-the-art, multi-zone plasma source and a Pressure-Controlled Kerfless Etching (PCKE) chamber for precise etching control and process repeatability. This next-generation etcher leverages a self-optimizing plasma source to minimize non-uniformities in wafer patterning performance and achieve faster throughput. The system employs a novel, high density, inductively coupled plasma (ICP) source along with an optimized magnetic field to control the etching process.The unit is equipped with spatial capabilities so as to accommodate overlapping or dual wavelength radiation sources with a variety of magnetic field configurations, offering flexibility in etching performance and conformalization of high-density DRAM layers. Its improved automated in-situ endpoint detection machine helps ensure accurate and repeatable etching of topographies on virtually any substrate. Some of the other features of Kiyo EX include a novel Shifted Flow Etch Chamber (SFEC) for improved etch uniformity, and a Look-Up Table (LUT) Process Control for rapid and accurate process repeatability. In addition, the tool can be configured with a number of different processes such as plasma Enhanced Chemical Vapor Deposition (PECVD), Atomic Layer Deposition (ALD) and Sputtering, ensuring full compatibility with diverse applications. The etch chambers on the asset are built with high-temperature stainless steel, and the pulse DC power supply units are designed to reduce harmonic distortion and maximize power efficiency. LAM RESEARCH Kiyo EX is the perfect solution for a wide range of advanced device manufacturing processes. With its efficient and reliable performance, Kiyo EX enablers highest yields and lowest Total Cost of Ownership (TCO). Built to deliver unrivaled performance, LAM RESEARCH Kiyo EX is a reliable etch solution for advanced device makers.