Used LAM RESEARCH Kiyo EX #9270879 for sale

LAM RESEARCH Kiyo EX is an etcher / asher that is tailored towards the semiconductor industry. It is a high-performance tool, capable of achieving excellent results when etching and ashing various materials such as Silicon, Gallium Arsenide and Silicon on Insulator (SoI) wafers. It comes with a powerful and user-friendly controller offering complete flexibility in controlling etch and ash processes. The process parameters are adjustable, providing a high degree of accuracy and precision. It is also ideal for low-k and III-V device fabrication. Kiyo EX is made up of several subsystems such as the powerful plasma source, etching chamber and wafer mapping table. The plasma source provides a reliable, uniform and effective delivery of metal ions and is responsible for uniform etching across the wafer surface. The etching chamber consists of several components like shower head, circulation pumps, and reject transport. This etching chamber is designed to deliver uniform depth and layer etching. The wafer mapping table is used to position and align the wafer to be etched. This ensures precision and repeatability of the etching process. LAM RESEARCH Kiyo EX offers a wide variety of etch chemistry such as HF-based chemistries, Cl2-based chemistries, and HBr-based chemistries, as well as a variety of background gases to facilitate uniform etching. It also comes equipped with multiple plasma generators that can deposit ions and energy precisely onto the wafer surface. Kiyo EX has a range of accessories and add-on modules that make it the perfect tool for advanced etching and ashing operations. It is a highly versatile tool, capable of processing substrates ranging from 2" to 200mm in diameter. LAM RESEARCH Kiyo EX also has several safety features such as interlocks and gas sensing that protect the tool from any potential damage. It is perfect for batch etching and ashing operations in a variety of industries for industry standard etching and ashing applications. With its versatility and precision, Kiyo EX is the perfect tool for any etching and ashing process.