Used LAM RESEARCH Kiyo EX #9358698 for sale

LAM RESEARCH Kiyo EX is a compact, self-contained etch solution ideally suited for a wide range of industrial, academic and research applications. The primary feature of this system is its sophisticated, high speed operation that offers precise process control and repeatability, allowing users to achieve repeatable and reliable results. Kiyo EX etcher is designed to be user friendly with intuitive operation features such as a large LCD display, intuitive user interface, advanced temperature and ionization control, and thickness and etch rate measurement. The etcher also features a large chamber for accommodating large substrates with a maximum substrate size of 250mmx250mm. The built-in sample vacuum chucker allows handling of large substrates for improved accuracy. LAM RESEARCH Kiyo EX etcher utilizes a variety of gas mixtures and other process parameters to deliver optimal results. It is equipped with an onboard gas mixer to manage the creation and delivery of precisely formulated gas mixtures and allows users to employ multiple process steps for various specialized etching techniques. Kiyo EX delivers a high degree of control over the entire etching process with features such as auto-leveling of the etching medium, pressure and temperature control, precise control of the ionization and process parameters, highly accurate measurement of etch rate, and measurement of substrate and product thickness. A variety of etching techniques can be employed on LAM RESEARCH Kiyo EX etcher, including deep silicon etching, wide-area Patterned Silicon etching, surface alloying, and ultra clean etching. The etcher also supports a number of single wafer techniques, including plasma etching, excimer laser patterning and mask-assisted etching. Kiyo EX also offers cost-effective use of chemicals with a patented wafer cassette recycling system for recovering expended etchant. This system reduces costs and enhances productivity by preventing the need to discard used etching media. LAM RESEARCH Kiyo EX also offers an extended warranty for added peace of mind and reliability. With its comprehensive list of features, Kiyo EX is an ideal solution for etching and cleaning applications in various industries.