Used LAM RESEARCH Kiyo EXP #293642656 for sale

LAM RESEARCH Kiyo EXP is an etch / asher that uses high-density plasma technology to deliver superior plasma etch performance in production environments. The device utilizes four RF sources with a wide plasma etch range, allowing for precise and flexible etching of a variety of materials, including Si, SiO2, SiN, SiON, GaN, UV and others. The device also has the capability of precision plasma cleaning and deposition, making it ideal for many production and R&D applications. Kiyo EXP's plasma etching process is rapid and accurate, with excellent control over material etching rate and feature topography. This high-precision etching enables precise depth control of deep micron features. In addition, LAM RESEARCH Kiyo EXP is equipped with an advanced equipment for uniform distribution of etching gases over the entire wafer surface, providing uniform etch rate and feature sidewall angle. The advanced automation of Kiyo EXP ensures that the right combination of processes, materials, and parameters are used for the etch or clean steps. Different programs, recipes, and predefined parameters can be stored for each procedure, which can be recalled and used as required. The device is also capable of additional features such as digital I/O, auto-tuning and wafer re-orientation. The automatic self-diagnostic monitoring system on LAM RESEARCH Kiyo EXP continually checks the unit health and operation status, allowing for real-time process optimization. The machine also gives users the ability to access data remotely over a secure Ethernet network via Ethernet protocol server. All in all, Kiyo EXP is a reliable and efficient etching/ashging platform ideal for production and research applications. With its high-precision etching capabilities, flexibility, secure remote data access, and automated health monitoring, LAM RESEARCH Kiyo EXP is one of the premier plasma etch/ash systems on the market.